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Surface chemical analysis. Auger electron spectroscopy. Repeatability and constancy of intensity scale
Description
Surface chemical analysis. Auger electron spectroscopy. Repeatability and constancy of intensity scale1 Scope This International Standard specifies a method for evaluating the constancy and repeatability of the intensity scale of Auger electron spectrometers, for general analytical purposes, using an electron gun with a beam energy of 2 keV or greater. It is only applicable to instruments that incorporate an ion gun for sputter cleaning. It is not intended to be a calibration of the intensity energy response function. That calibration may be made by
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Element names
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